Controlled co-evaporation of silanes for nanoimprint stamps

Nanotechnology 2005 / 05 Vol. 16; Iss. 5

Controlled co-evaporation of silanes for nanoimprint stamps

Schift, Helmut, Saxer, Sina, Park, Sunggook, Padeste, Celestino, Pieles, Uwe, Gobrecht, Jens
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Volume:
16
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/16/5/007
Date:
May, 2005
File:
PDF, 190 KB
english, 2005
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