Improved control of the phosphorous surface concentration...

physica status solidi (RRL) - Rapid Research Letters 2013 / 05 Vol. 7; Iss. 5

Improved control of the phosphorous surface concentration during in-line diffusion of c-Si solar cells by APCVD

Davis, Kristopher O., Jiang, Kaiyun, Demberger, Carsten, Zunft, Heiko, Haverkamp, Helge, Habermann, Dirk, Schoenfeld, Winston V.
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Volume:
7
Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201307020
Date:
May, 2013
File:
PDF, 313 KB
english, 2013
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