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Near surface layer evolution in Zn+ ions implanted Si upon annealing treatments
Saraykin, V.V., Shcherbachev, K.D., Petrov, D.V., Privezentsev, V.V.Volume:
267
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.08.006
Date:
February, 2013
File:
PDF, 571 KB
english, 2013