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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MEMS/MOEMS Components and Their Applications - Extended tuning range RF MEMS variable capacitors using electrostatic and electrothermal actuators
Girbau, David, Lazaro, Antonio, Pradell, Lluis, Janson, Siegfried W., Henning, Albert K.Volume:
5344
Year:
2004
Language:
english
DOI:
10.1117/12.524422
File:
PDF, 848 KB
english, 2004