![](/img/cover-not-exists.png)
[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate
Hyung Suk Lee,, Young Jun Yoon,, Dong-Hoon Choi,, Jun-Bo Yoon,Year:
2008
Language:
english
DOI:
10.1109/MEMSYS.2008.4443622
File:
PDF, 918 KB
english, 2008