Organometallic precursors in the growth of epitaxial thin films of III-V semiconductors by metal-organic chemical vapor deposition (MOCVD)
Zanella, P., Rossetto, G., Brianese, N., Ossola, F., Porchia, M., Williams, J. O.Volume:
3
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00014a008
Date:
March, 1991
File:
PDF, 2.36 MB
english, 1991