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Single-step 3D nanolithography using plasma polymerized hexane films
Pedersen, Rasmus H., Kustanovich, Kiryl, Gadegaard, NikolajVolume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.054
Date:
October, 2012
File:
PDF, 649 KB
english, 2012