SPIE Proceedings [SPIE Microtechnologies for the New...

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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Thermoelectric properties of bismuth telluride thin films deposited by radio frequency magnetron sputtering

Tan, J., Kalantar-zadeh, K., Wlodarski, W., Bhargava, S., Akolekar, D., Holland, A., Rosengarten, G., Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, Fernando
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Volume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.609819
File:
PDF, 458 KB
english, 2005
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