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Influence of substrate deformation on piezoelectric displacement measurement of piezoelectric film
Yan, Xingwei, Ren, Wei, Xin, Hong, Shi, Peng, Chen, Xiaofeng, Wu, XiaoqingVolume:
39
Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2012.10.140
Date:
May, 2013
File:
PDF, 661 KB
english, 2013