Mechanical and Ferroelectric Behavior of PZT-Based Thin Films
Yagnamurthy, Sivakumar, Chasiotis, Ioannis, Lambros, John, Polcawich, Ronald G., Pulskamp, Jeffrey S., Dubey, MadanVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2167666
Date:
December, 2011
File:
PDF, 715 KB
english, 2011