![](/img/cover-not-exists.png)
Experimental setup and electrical characteristics of an inductively coupled plasma
Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.Volume:
85
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.369150
File:
PDF, 799 KB
english, 1999