Nanovoid formation in helium-implanted single-crystal silicon studied by in situ techniques
Frabboni, S., Corni, F., Nobili, C., Tonini, R., Ottaviani, G.Volume:
69
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.69.165209
Date:
April, 2004
File:
PDF, 1.33 MB
english, 2004