Applications of “Dry” Processing in the Microelectronics...

Critical Reviews in Solid State and Material Sciences 2004 / 7 Vol. 29; Iss. 3

Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide

Jones, Charles, Zweber, Amy, DeYoung., James, McClain, James, Carbonell, Ruben, DeSimone, Joseph
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Volume:
29
Language:
english
Journal:
Critical Reviews in Solid State and Materials Sciences
DOI:
10.1080/10408430490888968
Date:
July, 2004
File:
PDF, 3.34 MB
english, 2004
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