Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide
Ritala, Mikko, Leskela, Markku, Rauhala, EeroVolume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00040a035
Date:
April, 1994
File:
PDF, 1.88 MB
english, 1994