Growth of IrO x...

Japanese Journal of Applied Physics 2011 / 5 Vol. 50; Iss. 5

Growth of IrO x –SnO x Films Deposited by Reactive Sputtering

Harada, Shun, Yoshino, Kenji, Fukudome, Syuji, Kawano, Yoshihiko, Sei, Fumihiro
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.05FB14
Date:
May, 2011
File:
PDF, 743 KB
english, 2011
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