Modeling argon inductively coupled plasmas: The electron...

Journal of Applied Physics 2002 Vol. 91; Iss. 6

Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Kiehlbauch, Mark W., Graves, David B.
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Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1452772
File:
PDF, 516 KB
english, 2002
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