Electrostatically actuated failure of microfabricated...

Proceedings Mathematical Physical & Engineering Sciences 1999 / 10 Vol. 455; Iss. 1990

Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

Kahn, H., Ballarini, R., Mullen, R. L., Heuer, A. H.
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Volume:
455
Language:
english
Journal:
Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences
DOI:
10.1098/rspa.1999.0478
Date:
October, 1999
File:
PDF, 761 KB
english, 1999
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