[NATO ASI Series] Nonequilibrium Processes in Partially...

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[NATO ASI Series] Nonequilibrium Processes in Partially Ionized Gases Volume 220 || Fundamental Properties of RF Glow Discharges: An Approach Based on Self—Consistent Numerical Models

Capitelli, Mario, Bardsley, J. Norman
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Volume:
10.1007/97
Year:
1990
Language:
english
DOI:
10.1007/978-1-4615-3780-9_9
File:
PDF, 4.25 MB
english, 1990
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