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Enhanced sensitivity to dielectric function and thickness of absorbing thin films by combining total internal reflection ellipsometry with standard ellipsometry and reflectometry
Lizana, A, Foldyna, M, Stchakovsky, M, Georges, B, Nicolas, D, Garcia-Caurel, EVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/10/105501
Date:
March, 2013
File:
PDF, 1.79 MB
english, 2013