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[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Void free and low stress shallow trench isolation technology using P-SOG for sub 0.1 μm device
Jin-Hwa Heo,, Soo-Jin Hong,, Dong-Ho Ahn,, Hyun-Duk Cho,, Moon-Han Park,, Fujihara, K., U-In Chung,, Yong-Chul Oh,, Joo-Tae Moon,Year:
2002
Language:
english
Pages:
2
DOI:
10.1109/VLSIT.2002.1015422
File:
PDF, 256 KB
english, 2002