Novel piezoelectric actuation mechanism for a gimbal-less...

Journal of Micromechanics and Microengineering 2011 / 07 Vol. 21; Iss. 7

Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications

Koh, Kah How, Kobayashi, Takeshi, Xie, Jin, Yu, Aibin, Lee, Chengkuo
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/075001
Date:
July, 2011
File:
PDF, 1.74 MB
english, 2011
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