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Two-Dimensional Fluid Model of Pulse Sheath in Plasma Immersion Ion Implantation With Dielectric Substrates
Li, Xue-Chun, Wang, You-NianVolume:
35
Language:
english
Pages:
7
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2007.903880
Date:
October, 2007
File:
PDF, 284 KB
english, 2007