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SPIE Proceedings [SPIE Khabaovsk, Russia - Khabrovsk (Friday 10 September 2004)] Fundamental Problems of Optoelectronics and Microelectronics II - Optical and structural properties of monocrystalline silicon wafers modified by compression plasma flow
Galkin, N. G., Chusovitin, E. A., Galkin, K. N., Astashinskii, V. M., Kostyukevich, E. A., Kuzmitski, A. M., Gerasimenko, A. V., Kulchin, Yuri N., Vitrik, Oleg B., Stroganov, Vladimir I.Volume:
5851
Year:
2005
Language:
english
Pages:
7
DOI:
10.1117/12.634533
File:
PDF, 910 KB
english, 2005