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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability
Schoneberg, U., Schnatz, F.V., Brockherde, W., Kopystynski, P., Mehlhorn, T., Obermeier, E., Benzel, H.Year:
1991
Pages:
4
DOI:
10.1109/SENSOR.1991.148869
File:
PDF, 212 KB
1991