Mechanical stresses and amorphization of ion-implanted...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 6 Vol. 304

Mechanical stresses and amorphization of ion-implanted diamond

Khmelnitsky, R.A., Dravin, V.A., Tal, A.A., Latushko, M.I., Khomich, A.A., Khomich, A.V., Trushin, A.S., Alekseev, A.A., Terentiev, S.A.
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Volume:
304
Language:
english
Pages:
6
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.03.030
Date:
June, 2013
File:
PDF, 769 KB
english, 2013
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