Deep and vertical silicon bulk micromachining using metal assisted chemical etching
Zahedinejad, Mohammad, Farimani, Saeed Delaram, Khaje, Mahdi, Mehrara, Hamed, Erfanian, Alireza, Zeinali, FiroozVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055015
Date:
May, 2013
File:
PDF, 2.40 MB
english, 2013