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Micromachining compatible metal patterning technique using localized decomposition of an organometallic compound by laser irradiation
Makino, Eiji, Shibata, TakayukiVolume:
8
Language:
english
Pages:
5
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/8/3/001
Date:
September, 1998
File:
PDF, 364 KB
english, 1998