Capacitive micromachined ultrasonic Lamb wave transducers...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2003 / 09 Vol. 50; Iss. 9

Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes

Badi, M.H., Yaralioglu, G.G., Ergun, A.S., Hansen, S.T., Wong, E.J., Khuri-Yakub, B.T.
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Volume:
50
Language:
english
Pages:
13
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2003.1235330
Date:
September, 2003
File:
PDF, 763 KB
english, 2003
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