Film growth and relationship between microstructure and...

Diamond and Related Materials 2001 / 2 Vol. 10; Iss. 2

Film growth and relationship between microstructure and mechanical properties of a-C:H:F films deposited by PECVD

Freire, F.L, Maia da Costa, M.E.H, Jacobsohn, L.G, Franceschini, D.F
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Volume:
10
Language:
english
Pages:
7
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00458-1
Date:
February, 2001
File:
PDF, 133 KB
english, 2001
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