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[IEEE 2011 IEEE Students' Technology Symposium (TechSym) - Kharagpur (2011.01.14-2011.01.16)] IEEE Technology Students' Symposium - Design and fabrication of silicon membrane by wet bulk micromachining process
Pramanick, B, Kundu, P, Bhattacharyya, T K, Das, SYear:
2011
Language:
english
DOI:
10.1109/TECHSYM.2011.5783828
File:
PDF, 1.36 MB
english, 2011