A Tunable Miniaturized RF MEMS Resonator With Simultaneous...

Journal of Microelectromechanical Systems 2013 / 04 Vol. 22; Iss. 2

A Tunable Miniaturized RF MEMS Resonator With Simultaneous High $Q$ (500–735) and Fast Response Speed $(

Small, Joshua, Arif, Muhammad Shoaib, Fruehling, Adam, Peroulis, Dimitrios
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2226928
Date:
April, 2013
File:
PDF, 2.15 MB
english, 2013
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