The removal of 10-nm contaminant particles from...

Journal of Nanoparticle Research 2013 / 04 Vol. 15; Iss. 4

The removal of 10-nm contaminant particles from micron-scale trenches using CO2nano bullets

Kim, Inho, Lee, JinWon
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Volume:
15
Language:
english
Journal:
Journal of Nanoparticle Research
DOI:
10.1007/s11051-013-1579-4
Date:
April, 2013
File:
PDF, 1.43 MB
english, 2013
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