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Diamond-like carbon for MEMS
Peiner, Erwin, Tibrewala, Arti, Bandorf, Ralf, Lüthje, Holger, Doering, Lutz, Limmer, WolfgangVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/S04
Date:
July, 2007
File:
PDF, 605 KB
english, 2007