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Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas
Chen, Yu, Guo, Zhi-Gang, Zhu, Xi-Ming, Mao, Zhi-Guo, Pu, Yi-KangVolume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/17/017
Date:
September, 2007
File:
PDF, 202 KB
english, 2007