PtSi contact metallurgy: Comparison of different annealing...

PtSi contact metallurgy: Comparison of different annealing sequences, annealing time and ambients, and deposition techniques of Pt

Chang, Chin-An
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Volume:
59
Year:
1986
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.336888
File:
PDF, 662 KB
english, 1986
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