SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Comparison among performance of strain sensors based on different semiconductor thin films
Fraga, Mariana A., Furlan, Humber, Pessoa, Rodrigo S., Schmid, Ulrich, Sánchez-Rojas, José Luis, Leester-Schaedel, MonikaVolume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886624
File:
PDF, 680 KB
english, 2011