Molecular beam mass spectrometry and modelling of CH4–CO2...

Molecular beam mass spectrometry and modelling of CH4–CO2 plasmas in relation with polycrystalline and nanocrystalline diamond deposition

Vandenbulcke, L., Gries, T., de Persis, S., Met, C., Aubry, O., Delfau, J.L.
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Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.03.018
Date:
July, 2010
File:
PDF, 1.91 MB
english, 2010
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