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Molecular beam mass spectrometry and modelling of CH4–CO2 plasmas in relation with polycrystalline and nanocrystalline diamond deposition
Vandenbulcke, L., Gries, T., de Persis, S., Met, C., Aubry, O., Delfau, J.L.Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.03.018
Date:
July, 2010
File:
PDF, 1.91 MB
english, 2010