Single crystal silicon nano-wire piezoresistors for...

Journal of Microelectromechanical Systems 2002 / 10 Vol. 11; Iss. 5

Single crystal silicon nano-wire piezoresistors for mechanical sensors

Toriyama, T., Tanimoto, Y., Sugiyama, S.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2002.802905
Date:
October, 2002
File:
PDF, 299 KB
english, 2002
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