[Communications in Computer and Information Science] Advances in Power Electronics and Instrumentation Engineering Volume 148 || Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor
Das, Vinu V, Thankachan, Nessy, Debnath, Narayan C.Volume:
10.1007/97
Year:
2011
Language:
english
DOI:
10.1007/978-3-642-20499-9_18
File:
PDF, 195 KB
english, 2011