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[Communications in Computer and Information Science] Advances in Power Electronics and Instrumentation Engineering Volume 148 || Design of High Sensitivity SOI Piezoresistive MEMS Pressure Sensor

Das, Vinu V, Thankachan, Nessy, Debnath, Narayan C.
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Volume:
10.1007/97
Year:
2011
Language:
english
DOI:
10.1007/978-3-642-20499-9_18
File:
PDF, 195 KB
english, 2011
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