Imaging and counting threading dislocations in c-oriented...

Semiconductor Science and Technology 2013 / 03 Vol. 28; Iss. 3

Imaging and counting threading dislocations in c-oriented epitaxial GaN layers

Khoury, M, Courville, A, Poulet, B, Teisseire, M, Beraudo, E, Rashid, M J, Frayssinet, E, Damilano, B, Semond, F, Tottereau, O, Vennéguès, P
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/3/035006
Date:
March, 2013
File:
PDF, 1.69 MB
english, 2013
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