The reliability of microelectromechanical systems (MEMS) in...

Journal of Microelectromechanical Systems 2002 / 06 Vol. 11; Iss. 3

The reliability of microelectromechanical systems (MEMS) in shock environments

Srikar, V.T., Senturia, S.D.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2002.1007399
Date:
June, 2002
File:
PDF, 413 KB
english, 2002
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