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Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method
Zhu, Qiushi, Muto, Takahiro, Yamada, Junzaburo, Kishi, Nozomu, Watanabe, Masato, Okino, Akitoshi, Horioka, Kazuhiko, Hotta, EikiVolume:
110
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3672816
File:
PDF, 1.92 MB
english, 2011