Integrated microcantilevers for high-resolution sensing and...

Measurement Science and Technology 2012 / 02 Vol. 23; Iss. 2

Integrated microcantilevers for high-resolution sensing and probing

Li, Xinxin, Lee, Dong-Weon
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Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/2/022001
Date:
February, 2012
File:
PDF, 8.58 MB
english, 2012
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