Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
Abadias, G, Leroy, W P, Mahieu, S, Depla, DVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/5/055301
Date:
February, 2013
File:
PDF, 1.03 MB
english, 2013