An approach for increasing drive-mode bandwidth of MEMS...

Journal of Microelectromechanical Systems 2005 / 06 Vol. 14; Iss. 3

An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes

Acar, C., Shkel, A.M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.844801
Date:
June, 2005
File:
PDF, 2.32 MB
english, 2005
Conversion to is in progress
Conversion to is failed