Multifunctional interferometric platform for on-chip...

Journal of Micro/Nanolithography MEMS and MOEMS 2005 / 10 Vol. 4; Iss. 4

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Gorecki, Christophe
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Volume:
4
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2110027
Date:
October, 2005
File:
PDF, 536 KB
english, 2005
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