Extending displacements of comb drive actuators by adding...

Journal of Micromechanics and Microengineering 2006 / 04 Vol. 16; Iss. 4

Extending displacements of comb drive actuators by adding secondary comb electrodes

Hou, Max Ti-Kuang, Huang, Gordon Kou-Wei, Huang, Jing-Yi, Liao, Ke-Min, Chen, Rongshun, Yeh, Jer-Liang Andrew
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Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/4/003
Date:
April, 2006
File:
PDF, 688 KB
english, 2006
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