SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride
Ladison, Julie L., Price, James J., Helfinstine, John D., Rosch, William R., Smith, Bruce W.Volume:
5754
Year:
2005
Language:
english
DOI:
10.1117/12.601033
File:
PDF, 224 KB
english, 2005