Titanium isopropoxide as a precursor in atomic layer...

Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films

Ritala, Mikko, Leskela, Markku, Niinisto, Lauri, Haussalo, Pekka
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Volume:
5
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00032a023
Date:
August, 1993
File:
PDF, 2.00 MB
english, 1993
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