[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Highly Flexible SU-8 Microstructures
Spratley, J. P. F., Ward, M. C. L., Hall, P. S.Year:
2007
Language:
english
DOI:
10.1109/SENSOR.2007.4300198
File:
PDF, 1.51 MB
english, 2007